Microwave Plasma Sources and Methods in Processing Technology (Hardcover)
暫譯: 微波等離子體源與加工技術中的方法 (精裝版)
Bardos, Ladislav, Barankova, Hana
- 出版商: Wiley
- 出版日期: 2022-02-23
- 售價: $1,950
- 貴賓價: 9.8 折 $1,911
- 語言: 英文
- 頁數: 256
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 111982687X
- ISBN-13: 9781119826873
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相關分類:
微波工程 Microwave
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商品描述
A practical introduction to microwave plasma for processing applications at a variety of pressures
In Microwave Plasma Sources and Methods in Processing Technology, an award-winning team of researchers delivers a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation.
This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of power, as well as their applications at reduced, atmospheric and higher pressures. They also describe plasmas inside liquids and plasma interactions with combustion flames.
Microwave Plasma Sources and Methods in Processing Technology concludes with an incisive exploration of new trends in the study and application of microwave discharges, offering promising new areas of study.
The book also includes:
- A thorough introduction to the basic principles of microwave techniques and power systems, including a history of the technology, microwave generators, waveguides, and wave propagation
- A comprehensive exploration of the fundamentals of the physics of gas discharge plasmas, including plasma generation, Townsend coefficients, and the Paschen curve
- Practical discussions of the interaction between plasmas and solid surfaces and gases, including PVD, PE CVD, oxidation, sputtering, evaporation, dry etching, surface activation, and cleaning
- In-depth examinations of microwave plasma systems for plasma processing at varied parameters
Perfect for researchers and engineers in the microwave community, as well as those who work with plasma applications, Microwave Plasma Sources and Methods in Processing Technology will also earn a place in the libraries of graduate and PhD students studying engineering physics, microwave engineering, and plasmas.
商品描述(中文翻譯)
微波等離子體在各種壓力下的處理應用實用入門
在微波等離子體源與處理技術中的方法一書中，一個獲獎的研究團隊提供了對微波及微波產生的等離子體的全面介紹。這本書非常適合對非熱氣體放電等離子體及其應用感興趣的讀者，內容包括微波功率、微波元件、等離子體及等離子體生成的詳細描述、解釋和實用指導。
本參考書包含超過130幅全彩圖示，以說明所討論的概念。著名的作者討論了在不同功率水平下產生的等離子體，以及它們在降低、常壓和更高壓力下的應用。他們還描述了液體中的等離子體及等離子體與燃燒火焰的相互作用。
微波等離子體源與處理技術中的方法以對微波放電研究和應用的新趨勢的深刻探索作結，提供了有前景的新研究領域。
本書還包括：
- 微波技術和功率系統基本原理的徹底介紹，包括技術歷史、微波發生器、波導和波的傳播
- 氣體放電等離子體物理基礎的全面探討，包括等離子體生成、湯斯頓係數和帕申曲線
- 等離子體與固體表面和氣體之間相互作用的實用討論，包括物理氣相沉積（PVD）、等離子體增強化學氣相沉積（PE CVD）、氧化、濺射、蒸發、乾蝕刻、表面活化和清潔
- 針對不同參數的等離子體處理的微波等離子體系統的深入檢視
這本書非常適合微波領域的研究人員和工程師，以及從事等離子體應用的專業人士，微波等離子體源與處理技術中的方法也將成為研究工程物理、微波工程和等離子體的碩士及博士生圖書館中的重要藏書。
作者簡介
Ladislav Bárdos is Professor at the Department of Electrical Engineering at Uppsala University. He received his PhD from the Institute of Plasma Physics at the Czech Academy of Sciences in 1978 and DrSc from the Charles University Prague in 1995. He was awarded the Plasma Physics Innovation Prize 2019 by the European Physical Society.
Hana Baránková is Professor at the Department of Electrical Engineering, Uppsala University. She received her PhD from the Institute of Radio Engineering and Electronics at the Czech Academy of Sciences in 1981. She was awarded the Plasma Physics Innovation Prize 2019 by the European Physical Society. She is Secretary of the Board of Directors at the Society of Vacuum Coaters in the US.
作者簡介(中文翻譯)
Ladislav Bárdos 是烏普薩拉大學電機工程系的教授。他於1978年在捷克科學院等離子體物理研究所獲得博士學位，並於1995年在布拉格查理大學獲得博士後學位。他於2019年獲得歐洲物理學會頒發的等離子體物理創新獎。
Hana Baránková 是烏普薩拉大學電機工程系的教授。她於1981年在捷克科學院無線電工程與電子學研究所獲得博士學位。她於2019年獲得歐洲物理學會頒發的等離子體物理創新獎。她是美國真空鍍膜協會董事會的秘書。
