Plasma Electronics: Applications in Microelectronic Device Fabrication
暫譯: 等離子體電子學：在微電子裝置製造中的應用
Makabe, Toshiaki, Petrovic, Zoran Lj
- 出版商: CRC
- 出版日期: 2016-10-26
- 售價: $3,850
- 貴賓價: 9.5 折 $3,658
- 語言: 英文
- 頁數: 412
- 裝訂: Quality Paper - also called trade paper
- ISBN: 1138034150
- ISBN-13: 9781138034150
海外代購書籍(需單獨結帳)
商品描述
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory.
Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.商品描述(中文翻譯)
超越啟用新功能，基於等離子體的技術，特徵為供應氣體的量子自由基，具有增強和改善許多過程和應用的潛力。延續其受歡迎的前身，《等離子體電子學（第二版）：微電子裝置製造中的應用》解釋了將這些技術從實驗室帶入工廠所需的基本物理學和數值方法。
強調計算算法和技術，這本更新版的受歡迎專著提供了等離子體物理學、計算方法、應用和處理技術的完整且最新的圖景。反映出計算輔助方法在等離子體分析和合成中的日益重要性，它展示了微電子學、納米電子學、MEMS/NEMS和生物科學製造的最新進展。
這本書是任何學習碰撞等離子體結構、功能和應用的人的有用資源，這一版反映了對非平衡低溫等離子體、表面處理和等離子體及其過程的預測建模的定量理解的最新進展。書中充滿了新的圖形、表格、問題和練習，並包含了一章關於大氣壓等離子體的發展，特別是微小單元等離子體，並討論了其在提高表面效率方面的實際應用。
本書提供了有關MEMS製造和在感應耦合等離子體中電容模式與感應模式之間相變的最新討論。除了關於ICP和MOS晶體管及MEMS製造中電容模式與感應模式之間相變的新章節外，書中還介紹了介質和反應器的熱傳遞和加熱的新討論。
整合物理學、數值方法和實際應用，本書 使您具備將實驗室突破擴展為工業創新的最新理解。
作者簡介
Toshiaki Makabe received his BSc, MSc, and Ph.D. degrees in electrical engineering all from Keio University. He became a Professor of Electronics and Electrical Engineering in the Faculty of Science and Technology at Keio University in 1991. He also served as a guest professor at POSTECH, Ruhr University Bochum, and Xi'an Jiaotong University. He was Dean of the Faculty of Science and Technology and Chair of the Graduate School from 2007 to 2009. Since 2009, he has been the Vice-President of Keio University in charge of research. He has published more than 170 papers in peer-reviewed international journals, and has given invited talks at more than 80 international conferences in the field of non-equilibrium, low-temperature plasmas and related basic transport theory, and surface processes. He is on the editorial board of Plasma Sources Science and Technology, and many times he has been a guest editor of the special issue about the low temperature plasma and the surface process of the Japanese Journal of Applied Physics, Australian Journal of Physics, Journal of Vacuum Science and Technology A, IEEE Transactions on Plasma Science, and Applied Surface Science, etc. He received the awards; Fluid Science Prize in 2003 from the Institute of Fluid Science, Tohoku University, Plasma Electronics Prize in 2004 from the Japan Society of Applied Physics, Plasma Prize in 2006 from the American Vacuum Society, etc. He is an associate member of the Science Council of Japan, and a foreign member of the Serbian Academy of Sciences and Arts. He is a fellow of the Institute of Physics, the American Vacuum Society, the Japan Society of Applied Physics, and the Japan Federation of Engineering Societies.
Zoran Lj. Petrovic obtained his Master's degree in the Department of Applied Physics, Faculty of Electrical Engineering in the University of Belgrade, and earned his Ph.D from Australian National University. He is the Head of the Department of Experimental Physics in the Institute of Physics, University of Belgrade. He has taught postgraduate courses in microelectronics, plasma kinetics and diagnostics and was a visiting professor in Keio University (Yokohama, Japan). He has received the Nikola Tesla award for technological achievement and the Marko Jaric Award for Great Achievement in Physics. He is a full member of the Academy of Engineering Sciences of Serbia and Serbian Academy of Sciences and Arts where he chairs the department of engineering science. Zoran Petrovic is a fellow of American Physical Society, vice president of the National Scientific Council of Serbia, and president of the Association of Scientific Institutes of Serbia. He is a member of editorial boards of Plasma Sources Science and Technology and Europena Physical Journal D. He has authored or co-authored over 220 papers in leading international scientific journals, and has given more than 90 invited talks at professional conferences. His research interests include atomic and molecular collisions in ionized gases, transport phenomena in ionized gases, gas breakdown, RF and DC plasmas for plasma processing, plasma medicine, positron collisions and traps, and basic properties of gas discharges.作者簡介(中文翻譯)
真木敏明於慶應義塾大學獲得電機工程學士、碩士及博士學位。他於1991年成為慶應義塾大學科學技術學院電子與電機工程系的教授。他還曾擔任POSTECH、魯爾大學波鴻及西安交通大學的客座教授。從2007年到2009年，他擔任科學技術學院院長及研究所所長。自2009年以來，他一直擔任慶應義塾大學負責研究的副校長。他在同行評審的國際期刊上發表了超過170篇論文，並在80多個國際會議上發表了有關非平衡、低溫等離子體及相關基本傳輸理論和表面過程的邀請演講。他是Plasma Sources Science and Technology的編輯委員會成員，並多次擔任日本應用物理學雜誌、澳大利亞物理學雜誌、真空科學與技術A期刊、IEEE等離子體科學期刊及應用表面科學等期刊低溫等離子體及表面過程特刊的客座編輯。他曾獲得多項獎項，包括2003年東北大學流體科學研究所的流體科學獎、2004年日本應用物理學會的等離子體電子學獎及2006年美國真空學會的等離子體獎等。他是日本科學會的副會員，並且是塞爾維亞科學與藝術學院的外籍會員。他是物理學會、美國真空學會、日本應用物理學會及日本工程學會聯合會的會士。
佐蘭·彼得羅維奇在貝爾格萊德大學電機工程學院應用物理系獲得碩士學位，並在澳大利亞國立大學獲得博士學位。他是貝爾格萊德大學物理研究所實驗物理系的系主任。他教授微電子學、等離子體動力學和診斷的研究生課程，並曾擔任慶應義塾大學（日本橫濱）的訪問教授。他獲得了尼古拉·特斯拉技術成就獎和馬爾科·雅里奇物理學卓越獎。他是塞爾維亞工程科學學院的正式會員，也是塞爾維亞科學與藝術學院的會員，並擔任工程科學部門的主席。佐蘭·彼得羅維奇是美國物理學會的會士，塞爾維亞國家科學委員會的副主席，以及塞爾維亞科學研究所協會的主席。他是Plasma Sources Science and Technology和European Physical Journal D的編輯委員會成員。他在國際領先的科學期刊上發表或共同發表了超過220篇論文，並在專業會議上發表了超過90場邀請演講。他的研究興趣包括電離氣體中的原子和分子碰撞、電離氣體中的傳輸現象、氣體擊穿、用於等離子體處理的射頻和直流等離子體、等離子體醫學、正電子碰撞和捕獲以及氣體放電的基本特性。
