Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma
暫譯: 光學材料：利用非電極等離子體微結構化表面

Kazanskiy, Nikolay L., Kolpakov, Vsevolod A.

Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma
  • 出版商: CRC
  • 出版日期: 2019-12-10
  • 售價: $4,110
  • 貴賓價: 9.5 折 $3,905
  • 語言: 英文
  • 頁數: 211
  • 裝訂: Quality Paper - also called trade paper
  • ISBN: 036788626X
  • ISBN-13: 9780367886264

    • 海外代購書籍(需單獨結帳)

商品描述

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

商品描述(中文翻譯)

本參考書專注於利用高壓氣體放電產生的非電極等離子體定向流來微結構化光學材料的表面，並開發與此技術相關的方法和設備。書中涵蓋了有關用於在電極間隙外生成等離子體的高壓氣體放電的電氣和物理特性的理論和實驗研究。還討論了一類新方法和設備，使得在大尺寸晶圓上製作衍射微結構的一系列工藝得以實現。

作者簡介

VSEVOLOD KOLPAKOV is a doctor of physics and mathematics and a professor in the Department of Electronic Engineering and Technology at the Samara National Research University (Samara State Aerospace University), Samara, Russia. He is an expert in ionplasma technology and quality management, the author and co-author of 120 scientific publications, including 3 monographs, 2 textbooks, and 40 articles, and a co-inventor of 9 patents.

NIKOLAY KAZANSKIY is head and acting director of the Diffractive Optics Laboratory at the Image Processing Systems Institute and a professor in the Technical Cybernetics Department at the Samara National Research University (Samara State Aerospace University), Samara, Russia. He is a member of SPIE and IAPR, the author and co-author of 240 articles and 10 monographs, and a co-inventor of 46 patents in diffractive optics, mathematical modelling, and nanophotonics.

作者簡介(中文翻譯)

VSEVOLOD KOLPAKOV 是一位物理與數學博士，並且是俄羅斯薩馬拉國立研究大學（薩馬拉國立航空航天大學）電子工程與技術系的教授。他是離子等離子技術和品質管理的專家，擁有120篇科學出版物的作者和共同作者，包括3本專著、2本教科書和40篇文章，並且是9項專利的共同發明人。

NIKOLAY KAZANSKIY 是影像處理系統研究所的衍射光學實驗室負責人及代理主任，同時也是俄羅斯薩馬拉國立研究大學（薩馬拉國立航空航天大學）技術控制系的教授。他是SPIE和IAPR的成員，擁有240篇文章和10本專著的作者和共同作者，並且在衍射光學、數學建模和納米光子學領域擁有46項專利的共同發明人。

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