Microwave Plasma Sources and Methods in Processing Technology (Hardcover) (微波等離子體源與加工技術方法)

Bardos, Ladislav, Barankova, Hana

Microwave Plasma Sources and Methods in Processing Technology (Hardcover)
  • 出版商: Wiley
  • 出版日期: 2022-02-23
  • 售價: $1,950
  • 貴賓價: 9.8 折 $1,911
  • 語言: 英文
  • 頁數: 256
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 111982687X
  • ISBN-13: 9781119826873
  • 相關分類: 微波工程 Microwave

    • 立即出貨 (庫存=1)

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商品描述

A practical introduction to microwave plasma for processing applications at a variety of pressures

In Microwave Plasma Sources and Methods in Processing Technology, an award-winning team of researchers delivers a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation.

This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of power, as well as their applications at reduced, atmospheric and higher pressures. They also describe plasmas inside liquids and plasma interactions with combustion flames.

Microwave Plasma Sources and Methods in Processing Technology concludes with an incisive exploration of new trends in the study and application of microwave discharges, offering promising new areas of study.

The book also includes:

  • A thorough introduction to the basic principles of microwave techniques and power systems, including a history of the technology, microwave generators, waveguides, and wave propagation
  • A comprehensive exploration of the fundamentals of the physics of gas discharge plasmas, including plasma generation, Townsend coefficients, and the Paschen curve
  • Practical discussions of the interaction between plasmas and solid surfaces and gases, including PVD, PE CVD, oxidation, sputtering, evaporation, dry etching, surface activation, and cleaning
  • In-depth examinations of microwave plasma systems for plasma processing at varied parameters

Perfect for researchers and engineers in the microwave community, as well as those who work with plasma applications, Microwave Plasma Sources and Methods in Processing Technology will also earn a place in the libraries of graduate and PhD students studying engineering physics, microwave engineering, and plasmas.

商品描述(中文翻譯)

《微波等離子體處理應用的實用介紹》是一本針對不同壓力下的微波等離子體處理應用的綜合介紹。在這本由屢獲殊榮的研究團隊撰寫的書中，讀者可以深入了解非熱氣體放電等離子體及其應用的詳細描述、解釋和實用指導。書中包含了超過130張全彩圖表，以便更好地說明所討論的概念。傑出的作者們討論了不同功率水平下產生的等離子體，以及它們在降壓、大氣和高壓下的應用。他們還描述了液體內的等離子體和等離子體與燃燒火焰的相互作用。《微波等離子體源和處理技術方法》以對微波放電研究和應用的新趨勢進行了深入探討，提供了有前景的新研究領域。本書還包括：微波技術和電源系統的基本原理詳細介紹，包括技術的歷史、微波發生器、波導和波的傳播；對氣體放電等離子體物理基礎的全面探討，包括等離子體生成、汤森德系數和帕森曲線；對等離子體與固體表面和氣體的相互作用進行實用討論，包括物理氣相沉積、等離子體增強化學氣相沉積、氧化、溅射、蒸發、乾法蝕刻、表面活化和清潔；對不同參數下的等離子體處理的微波等離子體系統進行深入研究。《微波等離子體源和處理技術方法》非常適合微波界的研究人員和工程師，以及從事等離子體應用的人士。同時，這本書也適合攻讀工程物理、微波工程和等離子體的碩士和博士研究生閱讀。

作者簡介

Ladislav Bárdos is Professor at the Department of Electrical Engineering at Uppsala University. He received his PhD from the Institute of Plasma Physics at the Czech Academy of Sciences in 1978 and DrSc from the Charles University Prague in 1995. He was awarded the Plasma Physics Innovation Prize 2019 by the European Physical Society.

Hana Baránková is Professor at the Department of Electrical Engineering, Uppsala University. She received her PhD from the Institute of Radio Engineering and Electronics at the Czech Academy of Sciences in 1981. She was awarded the Plasma Physics Innovation Prize 2019 by the European Physical Society. She is Secretary of the Board of Directors at the Society of Vacuum Coaters in the US.

作者簡介(中文翻譯)

Ladislav Bárdos是烏普薩拉大學電機工程系的教授。他於1978年從捷克科學院等離子物理研究所獲得博士學位，並於1995年從布拉格查理大學獲得博士科學學位。他於2019年獲得歐洲物理學會頒發的等離子物理創新獎。

Hana Baránková是烏普薩拉大學電機工程系的教授。她於1981年從捷克科學院無線電工程和電子學研究所獲得博士學位。她於2019年獲得歐洲物理學會頒發的等離子物理創新獎。她是美國真空鍍膜學會董事會秘書。

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