Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma
Nikolay L. Kazanskiy, Vsevolod A. Kolpakov
- 出版商: CRC
- 出版日期: 2017-03-23
- 售價: $9,280
- 貴賓價: 9.5 折 $8,816
- 語言: 英文
- 頁數: 229
- 裝訂: Hardcover
- ISBN: 1138197289
- ISBN-13: 9781138197282
海外代購書籍(需單獨結帳)
相關主題
商品描述
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.