Semiconductor Manufacturing Technology (Hardcover)

Chue San Yoo

Semiconductor Manufacturing Technology (Hardcover)
  • 出版商: World Scientific Pub
  • 出版日期: 2008-02-01
  • 售價: $1,450
  • 貴賓價: 9.8 折 $1,421
  • 語言: 英文
  • 頁數: 470
  • 裝訂: Hardcover
  • ISBN: 9812568239
  • ISBN-13: 9789812568236
  • 相關分類: 半導體

    • 立即出貨 (庫存=1)

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商品描述

This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

Contents:

  • Building Blocks for Integrated Circuits;
  • Thermal Oxidation;
  • Gas Kinetics and Plasma Physics;
  • Chemical Vapor Deposition;
  • Plasma-Enhanced Chemical Vapor Deposition and Etching;
  • Pattern Transfer: Photolithography;
  • Pattern Generation;
  • Doping Technology;
  • Metallization and Silicidation;
  • Planarization and CMP Technology;
  • Copper and Low-k.

商品描述(中文翻譯)

這本教科書包含了工程師在半導體產業中開展職業生涯所需的所有材料。它還為半導體研究提供了讀者所需的基本背景資訊。本書由一位在該領域工作超過二十年並在過去十五年中向大學生教授這門課程的專業人士撰寫。它以模塊化的形式包含了從原材料準備到晶片封裝的製程知識。

內容包括：
- 集成電路的基本組件
- 熱氧化
- 氣體動力學和等離子體物理
- 化學氣相沉積
- 等離子增強化學氣相沉積和蝕刻
- 圖案轉移：光刻
- 圖案生成
- 掺雜技術
- 金屬化和矽化
- 平坦化和化學機械研磨技術
- 銅和低介電常數材料

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