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Expectations of a technological revolution are associated with nanotechnology, and indeed the generation, modification and utilization of objects with tiniest dimensions already permeates science and research in a way that the absence of nanotechnology is no longer conceivable. It has progressed to an independent interdisciplinary field, its great success due to the purposeful combination of physical, mechanical and molecular techniques. This book starts out with the most important fundamentals of microtechnology and chemistry on which the understanding of shaping nanoscale structures are based, then a variety of examples illustrate the fabrication of nanostructures from different materials. Subsequently, methods for characterization of the generated structures are presented to the reader. Through this fascinating introduction, both scientists and engineers gain insights into the “other side” of nanotechnology
Table of Contents:
1. Introduction.
1.1 The Way into the Nanoworld.
1.1.1 From Micro- to Nanotechniques.
1.1.2 Definition of Nanostructures.
1.1.3 Insight into the Nanoworld.
1.2 Building Blocks of Nanotechnology.
1.3 Interactions and Topology.
1.4 The Microscopic Environment of the Nanoworld.
2. Molecular Basics.
2.1 Particles and Bonds.
2.1.1 Chemical Bonds in Nanotechnology.
2.1.2 Van der Waals Interactions.
2.1.3 Dipole-Dipole Interactions.
2.1.4 Ionic Interactions.
2.1.5 Metal Bonds.
2.1.6 Covalent Bonds.
2.1.7 Coordinative Bonds.
2.1.8 Hydrogen Bridge Bonds.
2.1.9 Polyvalent Bonds.
2.2 Chemical Structure.
2.2.1 Bonding Topologies.
2.2.2 Building Blocks of Covalent Architecture.
2.2.3 Units for a Coordinated Architecture.
2.2.4 Building Blocks for Weakly Bound Aggregates.
2.2.5 Assembly of Complex Structures through the Internal Hierarchy of Binding Strengths.
2.2.6 Reaction Probability and Reaction Equilibrium.
3. Microtechnological Foundations.
3.1 Planar Technology.
3.2 Preparation of Thin Layers.
3.2.1 Condition and Preprocessing of the Substrate Surface.
3.2.2 Layer Deposition from the Gas Phase.
3.2.3 Evaporation.
3.2.4 Sputtering.
3.2.5 Chemical Vapor Deposition.
3.2.6 Galvanic Deposition.
3.2.7 Deposition by Spinning (Spin Coating).
3.2.8 Shadow-mask Deposition Techniques.
3.3 Preparation of Ultrathin Inorganic Layers and Surface-bound Nanoparticles.
3.3.1 Ultrathin Layers by Vacuum Deposition Processes.
3.3.2 Deposition of Ultrathin Films from the Liquid Phase.
3.3.3 In Situ Generation of Ultrathin Inorganic Films by Chemical Surface Modification.
3.3.4 In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic Materials.
3.3.5 Immobilization of Nanoparticles.
3.3.6 In Situ Formation of Inorganic Nanoparticles.
3.4 Structure Generation and Fabrication of Lithographic Masks.
3.4.1 Adhesive Mask Techniques.
3.4.2 Role of Resist in Photolithography.
3.4.3 Serial Pattern Transfer.
3.4.5 Maskless Structure Generation.
3.4.6 Soft Lithography.
3.5 Etching Processes.
3.5.1 Etching Rate and Selectivity.
3.5.2 Isotropic and Anisotropic Etching Processes.
3.5.3 Lithographic Resolution in Etching Processes.
3.5.4 Dry Etching Processes.
3.5.6 High-resolution Dry Etching Techniques.
3.5.7 Choice of Mask for Nanolithographic Etching Processes.
3.6 Packaging.
3.7 Biogenic and Bioanalogue Molecules in Technical Microstructure.
4. Preparation of Nanostructures.
4.1 Principles of Fabrication.
4.1.1 Subtractive and Additive Creation of Nanostructures.
4.1.2 Nanostructure Generation by Lift-off Processes.
4.1.3 Principles of Nanotechnical Shape-definition and Construction.
4.2 Nanomechanical Structure Generation.
4.2.1 Scaling Down of Mechanical Processing Techniques.
4.2.2 Local Mechanical Cutting Processes.
4.2.3 Surface Transport Methods.
4.2.4 Reshaping Processes.
4.2.5 Printing Processes.
4.3 Nanolithography.
4.3.1 Structure Transfer by Electromagnetic Radiation.
4.3.2 Nanolithographic Transfer of Groups of Elements by Optical Projection.
4.3.3 EUV and X-ray Lithography.
4.3.4 Multilayer Resists Techniques with Optical Pattern Transfer.
4.3.5 Near-field Optical Structure Techniques with Contact masks.
4.3.6 Energetic Particles in Nanolithographic Structure Transfer.
4.3.7 Electron Beam Lithography.
4.3.8 Ion Beam Lithography.
4.3.9 Atomic Beam Lithography.
4.3.10 Molecular and Nanoparticle Beam Lithography.
4.3.11 Direct Writing of Structures by a Particle Beam.
4.3.12 Single-particle Beam Processes.
4.3.13 Nanofabrication by Self-structuring Masks.
4.4 Nanofabrication by Scanning Probe Techniques.
4.4.1 Scanning Force Probes.
4.4.2 Particle Manipulation With a Scanning Tunneling Microscope (STM).
4.4.3 Thermo-mechanical Writing of Nanostructures.
4.4.4 Electrically Induced Structure Generation by Scanning Probe Techniques.
4.4.5 Chemical Electrodeless Induced Scanning Probe Structure Generation.
4.4.6 Nanostructure Generation by Optical Near-field Probes.
5. Nanotechnical Structures.
5.1 Inorganic Solids.
5.1.1 Influence of Material Morphology on Nanoscale Pattern Processes.
5.1.2 Inorganic Dielectrics.
5.1.3 Metals.
5.1.4 Semiconductors.
5.1.5 Carbon.
5.2 Organic Solids and Layer Structures.
5.2.1 Solids Composed of Smaller Molecules.
5.2.2 Organic Monolayer and Multilayer Stacks.
5.2.3 Synthetic Organic Polymers.
5.2.4 Biopolymers.
5.3 Molecular Monolayer and Layer Architectures.
5.3.1 Langmuir-Blodgett Films.
5.3.2 Self-assembled Surface Films.
5.3.3 Binding of Molecules on Solid Substrate Surfaces.
5.3.4 Secondary Coupling of Molecular Manolayers.
5.3.5 Categories of Molecular Layers.
5.3.6 Molecular Coupling Components (Linkers) and Distance Components (Spacers).
5.3.7 Definition of Binding Spots on Solid Substrates.
5.4 Architectures with Single Molecules.
5.4.1 Single Molecules as Nanostructures.
5.4.2 Strategic of Molecular Construction.
5.4.3 Biogenic and Bioanalogous Nanoarchitectures.
5.4.4 DNA Nanoarchitectures.
5.4.5 Synthetic Supramolecules.
5.4.6 Nanoparticles and Nanocompartments.
5.5 Combination of Molecular Architectures and Nanoparticles with Planar Technical Structures.
6. Characterization of Nanostructures.
6.1 Geometrical Characterization.
6.1.1 Layer Thickness and Vertical Structure Dimensions.
6.1.2 Lateral Dimensions.
6.1.3 Structures that Assist Measurement.
6.2 Characterization of Composition of Layers and Surfaces.
6.2.1 Atomic Composition.
6.2.2 Characterization of the Chemical Surface.
6.3 Functional Characterization of Nanostructures.
7. Nanotransducers.
7.1 Design of Nanotransducers.
7.2 Nanomechanical Elements.
7.2.1 Nanomechanical Sensors.
7.2.2 Nanometer-precision Position Measurements with Conventional Techniques.
7.2.3 Electrically Controlled Nanoactuators.
7.2.4 Chemically Driven Nanoactuators.
7.2.5 Regidity of Nanoactuators.
7.3 Nanoelectronic Devices.
7.3.1 Electrical Contacts and Nanowires.
7.3.2 Nanostructured Tunneling Barriers.
7.3.3 Quantum Dots and Localization of Elementary Particles.
7.3.4 Nanodiodes.
7.3.5 Electron Islands and Nanotransistors.
7.3.6 Nanoswitches, Molecular Switches and Logic Elements.
7.4 Nanooptical Devices.
7.4.1 Nanostructures as Optical Sensors.
7.4.2 Nanostructured Optical Actuators.
7.4.3 Nanooptical Switching and Conversion Elements.
7.5 Magnetic Nanotransducers.
7.6 Chemical Nanoscale Sensors and Actuators.
8. Techncial Nanosystems.
8.1 What are Nanosystems?
8.2 Systems and Nanocomponents.
8.3 Entire Systems with Nanometer Dimensions.
Table of Examples.
References.
Index
商品描述(中文翻譯)
描述：
對於技術革命的期望與奈米技術息息相關，事實上，生成、修改和利用微小尺寸物體的過程已經滲透到科學和研究中，以至於無法想像沒有奈米技術的情況。它已經發展成為一個獨立的跨學科領域，其成功歸功於物理、機械和分子技術的有目的結合。本書首先介紹微技術和化學的最重要基礎，這些基礎是理解奈米尺度結構形成的基石，然後通過各種例子說明從不同材料製造奈米結構的過程。隨後，向讀者介紹生成結構的表徵方法。通過這個引人入勝的介紹，科學家和工程師都能深入了解奈米技術的“另一面”。
目錄：
1. 介紹
1.1 進入奈米世界的途徑
1.1.1 從微技術到奈米技術
1.1.2 奈米結構的定義
1.1.3 奈米世界的洞察
1.2 奈米技術的基本組件
1.3 互動與拓撲
1.4 奈米世界的微觀環境
2. 分子基礎
2.1 粒子與鍵結
2.1.1 奈米技術中的化學鍵
2.1.2 范德瓦耳斯力
2.1.3 偶極-偶極相互作用
2.1.4 離子相互作用
2.1.5 金屬鍵
2.1.6 共價鍵
2.1.7 配位鍵
2.1.8 氫橋鍵
2.1.9 多價鍵
2.2 化學結構
2.2.1 鍵結拓撲
2.2.2 共價結構的基本組件
2.2.3 協調結構的單位
2.2.4 弱鍵結聚集體的基本組件
2.2.5 通過鍵結強度的內部層次組裝複雜結構
2.2.6 反應概率與反應平衡
3. 微技術基礎
3.1 平面技術
3.2 薄層的製備
3.2.1 基板表面的條件與預處理
3.2.2 氣相沉積層
3.2.3 蒸發
3.2.4 濺射
3.2.5 化學氣相沉積
3.2.6 電鍍沉積
3.2.7 旋轉沉積（旋塗）
3.2.8 陰影掩模沉積技術
3.3 超薄無機層和表面固定的奈米粒子製備
3.3.1 通過真空沉積工藝製備超薄層
3.3.2 從液相沉積超薄薄膜
3.3.3 通過化學表面改性原位生成超薄無機薄膜
3.3.4 在異有機材料上原位形成超薄無機層
3.3.5 奈米粒子的固定
3.3.6 原位形成無機奈米粒子
3.4 結構生成與光刻掩模的製造
3.4.1 黏合掩模技術
3.4.2 光刻中光阻的作用
3.4.3 串行圖案轉移
3.4.5 無掩模結構生成
3.4.6 軟光刻
3.5 蝕刻工藝
3.5.1 蝕刻速率與選擇性
3.5.2 各向同性與各向異性蝕刻工藝
3.5.3 蝕刻工藝中的光刻解析度
3.5.4 干蝕刻工藝
3.5.6 高解析度干蝕刻技術
3.5.7 奈米光刻蝕刻工藝的掩模選擇
3.6 封裝
3.7 技術微結構中的生物源和生物類似分子
4. 奈米結構的製備
4.1 製造原則
4.1.1 減法與加法創建奈米結構
4.1.2 通過脫落工藝生成奈米結構
4.1.3 奈米技術形狀定義與建構原則
4.2 奈米機械結構生成
4.2.1 機械加工技術的縮小
4.2.2 局部機械切割工藝
4.2.3 表面傳輸方法
4.2.4 重新塑形工藝
4.2.5 印刷工藝
4.3 奈米光刻
4.3.1 通過電磁輻射進行結構轉移
4.3.2 通過光學投影進行元素群的奈米光刻轉移
4.3.3 極紫外光（EUV）和X射線光刻
4.3.4 具有光學圖案轉移的多層光阻技術
4.3.5 具有接觸掩模的近場光學結構技術
4.3.6 在奈米光刻結構轉移中的能量粒子
4.3.7 電子束光刻
4.3.8 離子束光刻
4.3.9 原子束光刻
4.3.10 分子和奈米粒子束光刻
4.3.11 通過粒子束直接寫入結構
4.3.12 單粒子束工藝
4.3.13 通過自結構掩模進行奈米製造
4.4 通過掃描探針技術進行奈米製造
4.4.1 掃描力探針
4.4.2 使用掃描隧道顯微鏡（STM）進行粒子操控
4.4.3 奈米結構的熱機械寫入
4.4.4 通過掃描探針技術進行電誘導結構生成
4.4.5 化學無電極誘導掃描探針結構生成
4.4.6 通過光學近場探針生成奈米結構
5. 奈米技術結構
5.1 無機固體
5.1.1 材料形態對奈米尺度圖案過程的影響
5.1.2 無機介電材料
5.1.3 金屬
5.1.4 半導體
5.1.5 碳
5.2 有機固體和層狀結構
5.2.1 由較小分子組成的固體
5.2.2 有機單層和多層堆疊
5.2.3 合成有機聚合物
5.2.4 生物聚合物
5.3 分子單層和層狀架構
5.3.1 Langmuir-Blodgett 薄膜
5.3.2 自組裝表面薄膜
5.3.3 分子在固體基板表面上的鍵結
5.3.4 分子單層的二次耦合
5.3.5 分子層的類別
5.3.6 分子耦合組件（連接器）和距離組件（間隔器）
5.3.7 在固體基板上鍵結點的定義
5.4 單分子的架構
5.4.1 單分子作為奈米結構
5.4.2 分子建構的策略
5.4.3 生物源和生物類似的奈米架構
5.4.4 DNA奈米架構
5.4.5 合成超分子
5.4.6 奈米粒子和奈米隔間
5.5 分子架構和奈米粒子與平面技術結構的結合
6. 奈米結構的表徵
6.1 幾何表徵
6.1.1 層厚度和垂直結構尺寸
6.1.2 橫向尺寸
6.1.3 協助測量的結構
6.2 層和表面成分的表徵
6.2.1 原子成分
6.2.2 化學表面的表徵
6.3 奈米結構的功能表徵
7. 奈米傳感器
7.1 奈米傳感器的設計
7.2 奈米機械元件
7.2.1 奈米機械傳感器
7.2.2 使用傳統技術進行奈米級精度的位置測量
7.2.3 電控奈米致動器
7.2.4 化學驅動的奈米致動器
7.2.5 奈米致動器的剛性
7.3 奈米電子設備
7.3.1 電接觸和奈米線
7.3.2 奈米結構的隧道障礙
7.3.3 量子點和基本粒子的定位
7.3.4 奈米二極體
7.3.5 電子島和奈米晶體管
7.3.6 奈米開關、分子開關和邏輯元件
7.4 奈米光學設備
7.4.1 奈米結構作為光學傳感器
7.4.2 奈米結構的光學致動器
7.4.3 奈米光學開關和轉換元件
7.5 磁性奈米傳感器
7.6 化學奈米級傳感器和致動器
8. 技術奈米系統
8.1 奈米系統是什麼？
8.2 系統和奈米元件
8.3 具有奈米級尺寸的整體系統
範例表
參考文獻
索引
