Dielectric Films for Advanced Microelectronics
暫譯: 先進微電子用介電薄膜

Name: Dielectric Films for Advanced Microelectronics
Price: 11315 TWD
Availability: OnlineOnly
Author: Baklanov, Mikhail, Maex, Karen, Green, Martin
ISBN: 0470013605

Baklanov, Mikhail, Maex, Karen, Green, Martin

出版商: Wiley
出版日期: 2007-03-19
售價: $11,910
貴賓價: 9.5 折 $11,315
語言: 英文
頁數: 486
裝訂: Hardcover - also called cloth, retail trade, or trade
ISBN: 0470013605
ISBN-13: 9780470013601
相關分類: 微電子學 Microelectronics

下單後立即進貨 (約1~3週)

商品描述

The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials.

This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

商品描述(中文翻譯)

薄膜的主題在材料科學、電機工程和應用固態物理學中越來越重要，並在微電子學、計算機製造和物理設備中具有研究和工業應用。先進的高性能計算機、高畫質電視、寬頻成像系統、平面顯示器、機器人系統以及醫療電子和診斷設備都是依賴薄膜材料的微型化設備技術的一些例子。

本書深入概述了現代介電薄膜在先進微電子應用領域的科學領導者所做的最新發展。它包含了對介電薄膜材料科學及其在設備運作中所面臨問題的清晰、簡明的解釋，包括高介電常數（high-k）、低介電常數（low-k）、中介電常數（medium-k）介電薄膜，以及用於封裝技術的介電薄膜的特定特徵和要求。書中涵蓋了從物理原理到新型介電薄膜的設計、製造、特性表徵和應用等廣泛相關主題。

作者簡介

Karen Maex, IMEC Fellow, Silicon Process and Device Technology Division, Leuven, Belgium & Professor at Katholieke Universiteit Leuven

Mikhail R. Baklanov, Principal Scientist, Silicon Process and Device Technology Division, IMEC, Leuven, Belgium

IMEC is the largest independent microelectronics R&D centre in Europe, with over 1250 staff. R&D ranges from the design of complex single-chip and single-package systems for telecommunications and multimedia, new process technologies for optoelectronics, photovoltaics, area-array packing, etc.