Silicon Sensors and Actuators: The Feynman Roadmap
暫譯: 矽感測器與致動器：費曼路線圖

Vigna, Benedetto, Ferrari, Paolo, Villa, Flavio Francesco

Silicon Sensors and Actuators: The Feynman Roadmap
  • 出版商: Springer
  • 出版日期: 2023-04-15
  • 售價: $2,880
  • 貴賓價: 9.5 折 $2,736
  • 語言: 英文
  • 頁數: 997
  • 裝訂: Quality Paper - also called trade paper
  • ISBN: 3030801373
  • ISBN-13: 9783030801373
  • 相關分類: 感測器 Sensor

    • 海外代購書籍(需單獨結帳)

商品描述

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman's visionary talk "There is Plenty of Room at the Bottom" to propose that the time has come to see silicon sensors as part of a "Feynman Roadmap" instead of the "More-than-Moore" technology roadmap. The sharing of the author's industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

商品描述(中文翻譯)

本書徹底回顧了目前對矽微機械傳感器的知識，並針對新興及未來的技術挑戰進行探討。讀者將獲得堅實的理論和實踐背景，使他們能夠分析設備的關鍵性能方面，批判性地評估製造過程，並構思和設計未來應用的新設備。展望未來複雜多功能的微系統，作者受到理查德·費曼（Richard Feynman）富有遠見的演講「底部有很多空間」（There is Plenty of Room at the Bottom）的啟發，提出現在是時候將矽傳感器視為「費曼路線圖」（Feynman Roadmap）的一部分，而非「超越摩爾定律」（More-than-Moore）技術路線圖。作者在開發、設計和製造方面的工業實績分享，以及他們對技術的前瞻性思考，將使讀者能夠以非常有效的方式加深對該主題核心的理解。參與矽基傳感器和執行器研究與開發的學生、研究人員、工程師和技術專家，將在本書中找到大量有用且開創性的資訊。

作者簡介

Benedetto Vigna is President of STMicroelectronics' (ST) Analog, MEMS & Sensors Group, a position he has held since January 2016. He has been a member of ST's Executive Committee since 2018. Vigna joined ST in 1995 and launched the company's efforts in MEMS. Under his guidance, ST's MEMS sensors established the company's leadership with large OEMs in motion-activated user interfaces. Vigna has piloted ST's successful moves into microphones, e-compasses, and touch-screen controllers, as well as environmental sensors, micro-actuators, industrial and automotive sensors, and low-power radios for IoT. Vigna's mandate was further expanded with analog ICs and RF products (2011) and smart-power devices for OEMs and mass-market (2016). ST's Imaging Division moved under his management in late 2017. Vigna has more than 200 patents on micromachining, authored numerous publications, and sits on the boards of several EU-funded programs. Vigna's contributions to the industry have been recognized with the MEMS Industry Group's Executive of the Year Award (2013), the European SEMI Award (2013), the IEEE Frederik Philips Award (2015), and the Manager of the Year 2017 by German magazine Markt & Technik. He joined the MEMS & Sensor Industry Group board in June 2019. Since February 2020, Vigna has been a member of the Electronics Cluster Advisory Board (CAB) for the Agency for Science, Technology, and Research (A*STAR) of Singapore. Since June 2020 he is also a Member of the Board of Technical Advisors of Leonardo Company. Benedetto Vigna graduated cum laude with a degree in Subnuclear Physics from the University of Pisa, Italy.
Paolo Ferrari is Senior Director of MEMS Technological Platforms Development within STMicroelectronics' (ST) Analog, MEMS & Sensors Group. He joined ST in 1980 and was involved in the development and integration of bipolar and mixed technologies (BCD). In 1998 he became responsible for the development of MEMS technologies and processes. He led the development of MEMS technologies from the first prototypes done in the Castelletto six-inch plant, to the high-volume production in Agrate Brianza. His development team along with the production team allowed ST to be the first company in the world capable of producing MEMS on 8" wfs. Ferrari currently holds more than 70 patents, many of them on Micromachining. In 2011 he received the National Award for Innovation ("Premio dei Premi") from the President of the Republic Giorgio Napolitano for the realization of the first three-axis digital gyroscope in MEMS Technology. The President of the Italian Republic, Sergio Mattarella, honored Paolo Ferrari with an important Award: "Stella al Merito del Lavoro" 2018. Paolo Ferrari graduated in Physics at the University of Milan in December 1979.

Ernesto Lasalandra is R&D General Manager in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). He graduated with a degree in Electronic Engineering from the University of Pavia, Italy, and then joined ST. He has piloted successful stories with microphones, magnetic sensors, environmental sensors, mirrors, actuators, and touch sensors., and has published numerous papers and publications on MEMS technology.

Flavio Francesco Villa is a member of Technical Staff in the Analog, MEMS & Sensor Group at STMicroelectronics (ST), where he is also a member of the ST Patents Committee concerning the field of Silicon Sensors and Actuators, Package, and Smart Power Technologies. He received the "Laurea" degree (Summa cum Laude) in Solid State Physics from the University of Milan. At the invitation of the University of Pavia, he has held educational seminars on micro-sensors, integrated microcircuits, and MEMS since 2004. He is a member of the Electrochemical Society and is the author or co-author of several papers and more than eighty international patents. He was a recipient of three exceptional patent awards from the STMicroelectronics Research Division.

Sarah Zerbini is MEMS Design Director in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). She received an MS degree in solid-state physics from Parma University before joining ST, where she has led the design of accelerometers, gyroscopes, magnetic sensors, mirrors, and actuators for the automotive and consumer market. She has authored more than 20 publications and 30 patents in the fields of micromachining technology, MEMS design, modeling, and characterization.

作者簡介(中文翻譯)

**Benedetto Vigna** 是 STMicroelectronics（ST）類比、MEMS 和傳感器集團的總裁，自 2016 年 1 月以來一直擔任此職位。他自 2018 年以來一直是 ST 的執行委員會成員。Vigna 於 1995 年加入 ST，並啟動了公司在 MEMS 領域的努力。在他的指導下，ST 的 MEMS 傳感器在運動啟動的用戶界面方面與大型 OEM 建立了公司的領導地位。Vigna 引領 ST 成功進入麥克風、電子羅盤和觸控屏控制器，以及環境傳感器、微執行器、工業和汽車傳感器，以及用於物聯網的低功耗無線電。Vigna 的職責在 2011 年進一步擴展至類比 IC 和 RF 產品，以及 2016 年針對 OEM 和大眾市場的智能電源設備。ST 的影像部門於 2017 年底納入他的管理範疇。Vigna 擁有超過 200 項微加工專利，撰寫了多篇出版物，並在幾個歐盟資助的計劃董事會中任職。Vigna 對行業的貢獻獲得了 MEMS 行業集團的年度執行官獎（2013）、歐洲 SEMI 獎（2013）、IEEE Frederik Philips 獎（2015），以及德國雜誌 *Markt & Technik* 的 2017 年度經理獎。他於 2019 年 6 月加入 MEMS 和傳感器行業集團董事會。自 2020 年 2 月以來，Vigna 成為新加坡科學技術研究局（A*STAR）電子集群諮詢委員會（CAB）的成員。自 2020 年 6 月起，他也是 Leonardo 公司的技術顧問委員會成員。Benedetto Vigna 以優異的成績畢業於意大利比薩大學，獲得亞核物理學學位。

**Paolo Ferrari** 是 STMicroelectronics（ST）類比、MEMS 和傳感器集團的 MEMS 技術平台開發高級總監。他於 1980 年加入 ST，參與了雙極和混合技術（BCD）的開發和整合。1998 年，他負責 MEMS 技術和工藝的開發。他領導了 MEMS 技術的開發，從在 Castelletto 六英寸工廠製作的第一個原型，到在 Agrate Brianza 的大規模生產。他的開發團隊與生產團隊合作，使 ST 成為全球首家能夠在 8 吋晶圓上生產 MEMS 的公司。Ferrari 目前擁有超過 70 項專利，其中許多涉及微加工技術。2011 年，他因實現第一個三軸數字陀螺儀的 MEMS 技術而獲得意大利共和國總統喬治·納波利塔諾頒發的國家創新獎（'Premio dei Premi'）。意大利共和國總統塞爾吉奧·馬塔雷拉於 2018 年授予 Paolo Ferrari 一項重要獎項：'Stella al Merito del Lavoro'。Paolo Ferrari 於 1979 年 12 月在米蘭大學獲得物理學學位。

**Ernesto Lasalandra** 是 STMicroelectronics（ST）類比、MEMS 和傳感器集團的研發總經理。他畢業於意大利帕維亞大學，獲得電子工程學位，然後加入 ST。他在麥克風、磁性傳感器、環境傳感器、鏡子、執行器和觸控傳感器等領域取得了成功的故事，並在 MEMS 技術上發表了多篇論文和出版物。

**Flavio Francesco Villa** 是 STMicroelectronics（ST）類比、MEMS 和傳感器集團的技術人員成員，同時也是 ST 專利委員會的成員，負責硅傳感器和執行器、封裝和智能電源技術領域。他在米蘭大學獲得固態物理學的 'Laurea' 學位（優異成績）。自 2004 年以來，他應帕維亞大學的邀請，舉辦有關微傳感器、集成微電路和 MEMS 的教育研討會。他是電化學學會的成員，並且是多篇論文的作者或合著者，擁有超過八十項國際專利。他曾獲得 STMicroelectronics 研究部門的三項卓越專利獎。

**Sarah Zerbini** 是 STMicroelectronics（ST）類比、MEMS 和傳感器集團的 MEMS 設計總監。她在帕爾馬大學獲得固態物理學碩士學位後加入 ST，在那裡她負責設計加速度計、陀螺儀、磁性傳感器、鏡子和執行器，服務於汽車和消費市場。她在微加工技術、MEMS 設計、建模和特性化領域發表了超過 20 篇出版物和 30 項專利。

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