Microsensors, MEMS and Smart Devices (Hardocver)
暫譯: 微傳感器、微機電系統與智慧裝置(精裝版)
Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
- 出版商: Wiley
- 出版日期: 2001-12-27
- 售價: $1,254
- 語言: 英文
- 頁數: 528
- 裝訂: Hardcover
- ISBN: 047186109X
- ISBN-13: 9780471861096
-
相關分類:
感測器 Sensor
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商品描述
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.
Table of Contents
Preface.
About the Authors.
Acknowledgments.
Introduction.
Electronic Materials and Processing.
MEMS Materials and their Preparation.
Standard Microelectronic Technologies.
Silicon Micromachining: Bulk.
Silicon Micromachining: Surface.
Microstereolithography for MEMS.
Microsensors.
Introduction to SAW Devices.
Surface Acoustic Waves in Solids.
IDT Microsensor Parameter Measurement.
IDT Microsensor Fabrication.
IDT Microsensors.
MEMS-IDT Microsensors.
Smart Sensors and MEMS.
Appendix A: List of Abbreviations.
Appendix B: List of Symbols and Prefixes.
Appendix C: List of Some Important Terms.
Appendix D: Fundamental Constants.
Appendix E: Unit Conversion Factors.
Appendix F: Properties of Electronic & MEMS Metallic Materials.
Appendix G: Properties of Electronic & MEMS Semiconducting Materials.
Appendix H: Properties of Electronic & MEMS Ceramic and Polymer Materials.
Appendix I: Complex Reciprocity Relation and Perturbation Analysis.
Appendix J: Coupled-mode Modeling of a SAW Device.
Appendix K: Suggested Further Reading.
Appendix L: Webography.
Appendix M: List of Worked Examples.
Index.
商品描述(中文翻譯)
微型感測器和微電機系統(MEMS)正在徹底改變半導體產業。微系統或所謂的「系統單晶片」結合了微電子電路、微型感測器和微型驅動器。這一新興領域已經發展出從電子鼻和智能耳到微型鑷子和現代噴墨噴嘴等應用。
本書提供微型感測器技術的完整概述,針對微型感測器、MEMS 和智能設備的成功應用,探討了重要的整合問題。
本書的特色包括:
* 回顧傳統和新興的製造過程,包括大宗和矽微加工、微立體光刻和聚合物處理方法。
* 專注於在低能耗無線 MEMS 或微型機器的開發中使用 IDT(互指換能器)微型感測器。
* 涵蓋智能設備中最新的應用,包括電子鼻、舌頭和手指,以及智能感測器和結構,如智能皮膚。
* 概述通過使用感測器陣列、感測器信號的參數補償和 ASIC 技術來開發智能感測設備。
* 綜合附錄概述了重要的 MEMS 材料特性、相關網站以及活躍於該領域的主要機構指南。
《微型感測器、MEMS 和智能設備》為讀者提供了理解和評估微系統的手段。高級學生和微電子研究人員、微型感測器系統的工程師和開發人員將發現這本全面的著作是必讀之作。對材料特性的詳細涵蓋使其成為機械工程師、物理學家和材料科學家在該領域的重要參考書。
目錄
前言。
關於作者。
致謝。
導言。
電子材料與處理。
MEMS 材料及其製備。
標準微電子技術。
矽微加工:大宗。
矽微加工:表面。
MEMS 的微立體光刻。
微型感測器。
SAW 設備介紹。
固體中的表面聲波。
IDT 微型感測器參數測量。
IDT 微型感測器製造。
IDT 微型感測器。
MEMS-IDT 微型感測器。
智能感測器和 MEMS。
附錄 A:縮寫列表。
附錄 B:符號和前綴列表。
附錄 C:一些重要術語列表。
附錄 D:基本常數。
附錄 E:單位換算因子。
附錄 F:電子和 MEMS 金屬材料的特性。
附錄 G:電子和 MEMS 半導體材料的特性。
附錄 H:電子和 MEMS 陶瓷及聚合物材料的特性。
附錄 I:複雜互惠關係和擾動分析。
附錄 J:SAW 設備的耦合模式建模。
附錄 K:建議進一步閱讀。
附錄 L:網路資源。
附錄 M:已解題例列表。
索引。