Fundamentals of Microelectromechanical Systems (MEMS)
暫譯: 微機電系統 (MEMS) 基礎原理
Kim, Eun Sok
- 出版商: McGraw-Hill Education
- 出版日期: 2021-05-03
- 售價: $4,170
- 貴賓價: 9.5 折 $3,962
- 語言: 英文
- 頁數: 416
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 1264257589
- ISBN-13: 9781264257584
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商品描述
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.
A complete guide to MEMS engineering, fabrication, and applications
This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development.
Coverage includes:
- Basic microfabrication
- Micromachining
- Transduction principles
- RF and optical MEMS
- Mechanics and inertial sensors
- Thin film properties and SAW/BAW sensors
- Pressure sensors and microphones
- Piezoelectric films
- Material properties expressed as tensor
- Microfluidic systems and BioMEMS
- Power MEMS
- Electronic noises, interface circuits, and oscillators
商品描述(中文翻譯)
出版社聲明：從第三方賣家購買的產品，出版社不保證其質量、真實性或對產品中包含的任何在線權益的訪問。
MEMS工程、製造和應用的完整指南
這本全面的工程指南逐步展示了如何將尖端的微電機械系統（MEMS）技術融入設計中，以實現物聯網（IoT）和人工智慧（AI）功能。由一位經驗豐富的教育者和微電子專家撰寫的《微電機械系統（MEMS）基礎》清楚地解釋了最新的技術和方法。真實世界的例子、插圖以及深入的問題和挑戰在整本書中強化了關鍵主題。讀者還將了解MEMS在職場的未來，並探索MEMS的研究與開發。
內容涵蓋：
- 基本微製造
- 微加工
- 轉換原理
- 無線頻率（RF）和光學MEMS
- 力學和慣性傳感器
- 薄膜特性及表面聲波（SAW）/體聲波（BAW）傳感器
- 壓力傳感器和麥克風
- 壓電薄膜
- 以張量表示的材料特性
- 微流體系統和生物MEMS
- 功率MEMS
- 電子噪聲、介面電路和振盪器
作者簡介
Eun Sok Kim, Ph.D., is a professor in the department of Electrical and Computer Engineering-Electrophysics at University of Southern California, Los Angeles. He is an expert in piezoelectric and acoustic MEMS as well as electromagnetic vibration-energy harvesting, has published about 250 papers and 16 issued patents, and is a Fellow of the Institute of Electrical and Electronics Engineers (IEEE) and the Institute of Physics (IOP).
作者簡介(中文翻譯)
金恩碩 (Eun Sok Kim), 博士，是南加州大學洛杉磯分校電機與計算機工程系-電磁物理的教授。他是壓電和聲學微機電系統 (MEMS) 以及電磁振動能量收集的專家，已發表約250篇論文和16項專利，並且是電氣和電子工程師學會 (IEEE) 和物理學會 (IOP) 的會士。
