Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
暫譯: 晶圓製造：單晶矽晶圓的成形

Kao, Imin, Chung, Chunhui

Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
  • 出版商: Wiley
  • 出版日期: 2021-03-29
  • 定價: $5,360
  • 售價: 9.5 折 $5,092
  • 語言: 英文
  • 頁數: 304
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 0470061219
  • ISBN-13: 9780470061213

    • 立即出貨 (庫存=1)

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商品描述

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

商品描述(中文翻譯)

本書介紹了晶圓製造的所有主要階段，從晶體到初級晶圓。

本書首先概述了物理學、相關的計量學、過程建模和質量要求，然後討論了晶圓成形和晶圓表面準備技術。最後以一章關於晶圓製造的研究和未來挑戰作為結尾。

作者簡介

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.

Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.

作者簡介(中文翻譯)

Imin Kao 是美國紐約州立大學石溪校區機械工程系的教授。他是資訊與技術研究本科學院的教學主任。他擁有三項專利，研究重點包括使用柔性接觸的機器人操作以及利用微機電系統（MEMS）的智慧接觸表面技術。

Chunhui Chung 是台灣國立成功大學機械工程系的副教授。

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