Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices Richard C. Jaeger

For courses in Theory and Fabrication of Integrated Circuits.

The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.

Table of Contents

Preface.
1. An Overview of Microelectronic Fabrication.
2. Lithography.
3. Thermal Oxidation of Silicon.
4. Diffusion.
5. Ion Implantation.
6. Film Deposition.
7. Interconnections and Contacts.
8. Packaging and Yield.
9. MOS Process Integration.
10. Bipolar Process Integration.
11. Processes for Microelectromechanical Systems—MEMS.
Answers to Selected Problems.
Index.