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商品描述
Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
商品描述(中文翻譯)
為科學和工程學生設計的《微製造與奈米技術的製造技術》專注於製造MEMS和NEMS設備的過程中出現的新興趨勢。本書回顧了不同形式的光刻技術、減材加工過程和增材技術，詳細說明了與用於製作IC的微型化過程最為不同的技術。書中全面涵蓋了自上而下和自下而上的製造過程，並比較了不同方法的優缺點。讀者應將這本彩色書籍作為指南，以幫助確定任何類型微型或奈米機器的適當製造技術。
