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商品描述
Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
商品描述(中文翻譯)
《微製造技術與納米技術》是專為科學和工程學生設計的，重點關注製造微機電系統（MEMS）和納米機電系統（NEMS）設備的新興趨勢。本書回顧了不同形式的光刻術、減材料去除工藝和添加技術，詳細介紹了與製造集成電路（ICs）最不同的微型化工藝。全面介紹了自上而下和自下而上的製造工藝，並比較了不同方法的優點。讀者可以將本書作為指南，幫助確定適合任何類型的微型或納米機器的製造技術。
