Optical Mems, Nanophotonics, and Their Applications
暫譯: 光學微機電系統、奈米光子學及其應用

本書涵蓋光學微機電系統（MEMS）和納米光子學的設備設計基礎和系統應用。專家作者展示了納米電機械系統（NEMS）與納米光子元件融合的範例，這種融合正在創造出強大的新型光子設備和系統，包括MEMS微鏡、MEMS可調濾波器、基於MEMS的可調透鏡和光圈、NEMS驅動的可變矽納米線波導耦合器，以及NEMS可調光子晶體納米腔。該書還探討了在激光掃描顯示器、內窺鏡系統、太空望遠鏡、光學電信系統和生物醫學植入系統中的系統應用。

- 提出將機械和光子元件縮小到納米範疇的努力，以增強性能、更快的操作速度、更大的帶寬和更高的集成度。
- 展示MEMS和光學/光子設備整合到實際商業產品中的案例。
- 涉及光學電信、感測、成像和生物醫學系統的應用。

**李文彥教授**是新加坡國立大學電機與計算機工程系的副教授。

**周光雅教授**是新加坡國立大學機械工程系的副教授。

Prof. Guangya Zhou received the B.Eng. and Ph.D. degrees in optical engineering from Zhejiang University, Hangzhou, China. His PhD thesis was on micro optics and diffractive optics. He was a post-doctoral fellow at state key laboratory of thin film and microfabrication technology at Shanghai Jiao Tong University conducting research on optical MEMS for telecommunication systems. He has been a research fellow at the School of Electrical and Electronic Engineering at Nanyang Technological University. He is now an associate professor in the Department of Mechanical Engineering, National University of Singapore. His research covers optical MEMS scanners, MEMS spectrometers and hyperspectral imagers, optical MEMS based ultra-compact endoscope probes, silicon nanophotonics, NEMS tunable photonic crystals, and nano scale optomechanics. He has published about 90 research papers in peerreviewed international journals, and is the main inventor of the MEMS-driven vibratory grating scanner, MEMS-based miniature zoom lens system with autofocus function, and miniature MEMS-based adjustable aperture. The latter two were successfully licensed to a start-up company, where he currently works as a technical advisor.

Prof. Vincent C. Lee received his PhD from The University of Tokyo in 1996. He has served as JST Research Fellow at AIST, MITI of Japan, Senior Research Staff Member of the Microsystems Laboratory, Industrial Technology Research Institute, Hsinchu, Manager of the MEMS Device Division of Metrodyne Microsystem Corporation, Hsinchu, Adjunct Assistant Professor with the Electro-Physics Department, National Chiao Tung University, Hsinchu, and Adjunct Assistant Professor with the Institute of Precision Engineering, National Chung Hsing University, Taichung, Taiwan. He cofounded Asia Pacific Microsystems, Inc., Hsinchu, where he was a Vice President, and also was a Senior Member of the Technical Staff at the Institute of Microelectronics, A*STAR, Singapore. Currently, he is an Associate Professor with the Department of Electrical and Computer Engineering, National University of Singapore, Singapore. He is the co-author of Advanced MEMS Packaging (McGraw-Hill, 2010). He has contributed to more than 230 international conference papers and extended abstracts and 160 peer-reviewed international journal articles in the fields of Optical MEMS, NEMS, nanophotonics and nanotechnology. He holds nine U.S. patents.

周光雅教授於中國杭州的浙江大學獲得光學工程的學士及博士學位。他的博士論文研究微光學和衍射光學。他曾在上海交通大學的薄膜與微製造技術國家重點實驗室擔任博士後研究員，進行光學MEMS在電信系統中的研究。他曾在南洋理工大學的電機與電子工程學院擔任研究員。目前，他是新加坡國立大學機械工程系的副教授。他的研究涵蓋光學MEMS掃描器、MEMS光譜儀和高光譜成像儀、基於光學MEMS的超緊湊內窺鏡探頭、矽奈米光子學、NEMS可調光子晶體以及納米尺度的光機械學。他在同行評審的國際期刊上發表了約90篇研究論文，並且是MEMS驅動的振動光柵掃描器、基於MEMS的自動對焦迷你變焦鏡頭系統以及迷你MEMS可調光圈的主要發明人。後兩者已成功授權給一家初創公司，他目前在該公司擔任技術顧問。

李文賢教授於1996年獲得東京大學的博士學位。他曾擔任日本產業技術綜合研究所（AIST）的JST研究員、工業技術研究院微系統實驗室的高級研究成員、Metrodyne微系統公司的MEMS設備部經理、國立交通大學電物理系的兼任助理教授，以及國立中興大學精密工程研究所的兼任助理教授。他共同創辦了亞太微系統公司，並擔任副總裁，還曾是新加坡A*STAR微電子研究所的高級技術成員。目前，他是新加坡國立大學電機與計算機工程系的副教授。他是《先進MEMS封裝》（McGraw-Hill, 2010）的共同作者。他在光學MEMS、NEMS、奈米光子學和奈米技術領域貢獻了超過230篇國際會議論文和擴展摘要，以及160篇同行評審的國際期刊文章。他擁有九項美國專利。