Capacitive Silicon Resonators: Performance Enhancement Methods
暫譯: 電容式矽共振器：性能提升方法
Van Toan, Nguyen, Ono, Takahito
- 出版商: CRC
- 出版日期: 2019-06-24
- 售價: $5,230
- 貴賓價: 9.5 折 $4,969
- 語言: 英文
- 頁數: 162
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 0367217767
- ISBN-13: 9780367217761
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相關主題
商品描述
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.
Features
- Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators
- Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator.
- Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor.
- Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body.
- Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
商品描述(中文翻譯)
微製造共振器在多種應用中扮演著重要角色，包括質量感測、定時參考應用和過濾應用。許多轉換機制，包括壓電、壓阻和電容機制，已被研究以誘導和檢測共振器的運動。本書旨在介紹並建議幾種技術方法以及設計考量，以提升電容矽共振器的性能，對於從事微納米技術領域的工作者將會非常有用。
**特色**
- 介紹並建議幾種技術方法以及設計考量，以提升電容矽共振器的性能。
- 提供有關各種製造技術和設計考量的信息，這些技術和考量可以用來改善電容矽共振器的性能，該共振器是取代石英晶體共振器的有前景選擇之一。
- 討論幾種技術方法，包括基於LTCC基板的密封包裝、深反應離子蝕刻、中性束蝕刻技術和金屬輔助化學蝕刻，以及設計考量，針對機械耦合、高階模式的選擇性振動、可移動電極結構和壓阻熱引擎進行研究，以實現小的運動阻抗、低插入損耗和高品質因數。
- 專注於基於測量感測電極與共振體之間電容變化的電容感測方法。
- 回顧電容矽共振器性能提升方法的最新進展，這些方法主要基於作者的研究成果。
作者簡介
Nguyen Van Toan received his B.S. degree in 2006 and his M.S. degree in 2009 in physics and electronics, respectively, from University of Science, Vietnam National University, Ho Chi Minh City, Viet Nam. He received his Dr. Eng. degree from Tohoku University in 2014 for research on silicon capable of integrating LSI for application to timing devices. He is working as an assistant professor in the Department of Mechanical Engineering, Graduate School of Engineering at Tohoku University. His current research interests include capacitive silicon resonators, optical modulator devices, capacitive micromachined ultrasonic transducers, thermal electric power generators, Knudsen pump, ion transportation, and metal-assisted chemical etching.
Takahito Ono is currently a Professor at Mechanical Systems Engineering, Graduate School of Engineering in Tohoku University. He was born in Hokkaido, Japan on 12 July 1967. He received the B.S. degree in physic from Hirosaki University, Japan, in 1990 and the M.S. degree in physics from Tohoku University, Japan. He received the Dr.Eng. degree in mechatronics and precision engineering from Tohoku University in 1996. During 1996-2001, he has been a Research Associate, and Lecturer in the Department of Mechatronics and Precision Engineering, Tohoku University. He had studied about nanomachining, scanning probe and its related technologies including high density storage devices. During 2001-2009, he has been an Associate Professor, and have developed nanomechanics and nanomechanical sensors. Since 2009, he is the Professor of Tohoku University. His expertise is in the area of microelectromechnical systems (MEMSs), nanoelectromechanical systems (NEMSs), silicon based nanofabrication, ultrasensitive sensing based on NEMSs/MEMSs. Also during 2012-2014 he was director of Micro/Nanomachining Research and Education Center, Tohoku University. Since 2010 he serves a co-director of "Microsystem Integration Center (μSiC), Tohoku University. Since 2013, he has additional post, a Professor of Guest Courses, Mechanical Departments, The University of Tokyo, and working on Nanomechanics.
作者簡介(中文翻譯)
阮文通於2006年獲得越南胡志明市國立大學科學大學物理與電子學的學士學位，並於2009年獲得碩士學位。他於2014年在東北大學獲得工程博士學位，研究主題為能整合大規模積體電路（LSI）以應用於計時裝置的矽材料。他目前在東北大學工程研究所機械工程系擔任助理教授。其目前的研究興趣包括電容式矽共振器、光調變器、電容式微機電超聲波傳感器、熱電發電機、克努森泵、離子運輸及金屬輔助化學蝕刻。
小野隆仁目前是東北大學工程研究所機械系統工程的教授。他於1967年7月12日出生於日本北海道。1990年，他在日本弘前大學獲得物理學學士學位，並在東北大學獲得物理學碩士學位。他於1996年在東北大學獲得機電一體化與精密工程的工程博士學位。在1996年至2001年間，他擔任東北大學機電一體化與精密工程系的研究助理及講師，研究主題包括奈米加工、掃描探針及其相關技術，包括高密度儲存裝置。在2001年至2009年間，他擔任副教授，並發展奈米力學及奈米機械傳感器。自2009年以來，他成為東北大學的教授。他的專長領域包括微機電系統（MEMS）、奈米機電系統（NEMS）、基於矽的奈米製造及基於NEMS/MEMS的超靈敏感測技術。此外，在2012年至2014年間，他擔任東北大學微/奈米加工研究與教育中心的主任。自2010年以來，他擔任東北大學微系統整合中心（μSiC）的共同主任。自2013年起，他還擔任東京大學機械系的客座教授，並從事奈米力學的研究。
