Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Paperback)

David Attwood

  • 出版商: Cambridge
  • 出版日期: 2007-03-05
  • 售價: $2,695
  • 貴賓價: 9.5$2,560
  • 語言: 英文
  • 頁數: 470
  • 裝訂: Paperback
  • ISBN: 052102997X
  • ISBN-13: 9780521029971
  • 相關分類: 光學 Optics半導體物理學 Physics
  • 立即出貨(限量) (庫存=1)

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商品描述

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

商品描述(中文翻譯)

這本自成一體、全面的書籍描述了軟X射線和極紫外(EUV)輻射的基本特性,並討論了它們在各個領域的應用,包括半導體晶片製造的EUV微影術和軟X射線生物顯微術。作者首先介紹了相關的基本原理,如輻射和散射、波的傳播、繞射和相干性。然後他繼續探討了各種現象和應用。所涵蓋的主題包括EUV微影術、生物顯微術、光譜顯微術、EUV天文學、同步輻射和軟X射線激光。他還提供了大量有用的參考資料,如電子束綁定能、特徵發射線和光吸收截面。這本書對工程、物理、化學和生命科學的研究生和研究人員非常有興趣。同時,從事半導體製造和材料科學的實踐工程師也會對此感興趣。